Fast self‐compensating ellipsometer

Fast, Self-nulling Spectroscopic Ellipsometer : Instrumentation and Application

The advantages of rapid spectral scanning have been combined with -the inherent accuracy of a compensating ellipsometer operated in the polarizer-compensator-sample-analyzer configuration. Wavelength is varied over the visible-UV ( 3 7 0 7 2 0 nm) at a maximum rate of 114 nm/s by rotating a continuously-variable interference filter. A three-reflection Fresnel rhomb serves as the achromatic quar...

A Retardation Modulation Ellipsometer for Studying Fast Surface Transients

Rotating analyzer–fixed analyzer ellipsometer based on null type ellipsometer

The theory and design of an inexpensive rotating analyzer unit is presented, which allows a conventional null type ellipsometer to work as rotating analyzer–fixed analyzer automatic ellipsometer, without sacrificing the possibility to work in null mode. The mode switching is performed simply by adding or removing the rotating analyzer from its holder. It is shown that the rotating analyzer phas...

Spectroscopic Ellipsometer and Polarimeter Systems

Ellipsometer nulling: convergence and speed.

The process of nulling in ellipsometry is studied by a graphical presentation using the trajectories of two significant polarization states in the complex plane, (XPC) and (XSA). These states are determined by (1) the polarizer and compensator ((XPC)) and (2) the specimen and the analyzer ((XSA)) in the polarizer-compensator-specimen-analyzer ellipsometer arrangement. As the azimuth angles of t...